Vacuum Multi-station Stainless Steel Solvent Removal Glove Box with Spin Coater Used in Photovoltaic Industry

Vacuum Multi-station Stainless Steel Solvent Removal Glove Box with Spin Coater Used in Photovoltaic Industry

Note: This image is for reference only

Note:a.The length of the single side double station glove box can be 1800mm or 2400mm, depending on the customer's needs.

b.At present, the coater does not require external computer operation, because the device has a touch screen operation, which can be operated directly on the coater equipment.

The bottom of the glove box on the left is the controller of the coating instrument, and the right bottom of the glove box on the left can be placed the solar simulator or the purification cabinet of the equipment.

The glove box on the right side of the equipment is a single-sided single-station glove box, and the lower right corner is a purification cabinet. When the equipment is exported, we will put the purification cabinet at the bottom of the glove box, which is conducive to transportation.

A. Acceptance criteria

Under standard conditions, that is, under constant temperature of 20-25℃, relative humidity of 65%, and inert air source of 99.999%, the oxygen index of circulating water in the empty tank body is less than 1ppm.

B. Main technical indicators and configuration

1. Box

1.1. Size: 1800mm (L) x 900mm (H) x 750mm (W) +1200mm (L) x 900mm (H) x 750mm (W).

1.2. Material: stainless steel structure (Type 304), thickness 3mm.

1.3. Filter: Aperture 0.3 micron

1.4. Butyl rubber gloves: original imported from the United States thickness 0.4mm, glove mouth 8 inches, duraluminum-alloy glove mouth (anti-corrosion treatment, anodized aluminum), diameter 220mm. The 2400 boxes have four glove ports, and the 1200 boxes have two glove ports.

1.5. Window: Inclined design operating surface, 8mm safety tempered glass front window, wear resistance, corrosion resistance, good light transmission, sealing ring with 3/8 inch thick OMEGA sealing ring.

1.6. Maintain a certain positive and negative pressure (-10mbar-10mbar) during use

1.7. The box is equipped with anti-reflection lighting energy-saving lamps, and the light is soft.

1.8. The box body is provided with a display board 2-layer shelf

1.9. The box is equipped with a porous power terminal board (Power supply: 220V±10% 50Hz±10%)

1.10. Each box is equipped with eight standard KF-40 ports.

1.11. Leakage rate: ≤0.05vol%/h.

1.12. Steel structure bracket, including casters 950mm high, installed with universal casters.

1.13. Reserve a solar simulator flange at the bottom of the left box.

2. Transition cabin

2.1 T-type large transition cabin (in the middle of the two boxes)

2.1.1. Shape: T-shaped (304 stainless steel), two boxes connected to the glove box, three-door design, easy to operate.

2.1.2. Dimensions: Diameter 360mm, length 700mm large transition cabin, piston door, transition cabin with sliding tray, polishing.

2.1.3. Pallet: Freely movable extension (large transition cabin configuration).

2.1.4. Vacuum ≤-0.1mpa(extract vacuum and display vacuum value).

2.2 Small transition cabin (right side of two boxes)

2.2.1. A small transition cabin is arranged on the right side of the two boxes respectively.

2.2.2. Specifications: Diameter 150mm, length 300mm, manual valve control pumping and replenishing.

2.2.3. Vacuum degree ≤-0.1mpa(the transition cabin is required to extract vacuum and display the vacuum value).

2.3 Large transition cabin (right side of 1200 box)

2.3.1. Shape: Cylindrical (304 stainless steel), connected to the glove box, with shaft lock type large transition door, easy to operate.

2.3.2. Size: Diameter 360mm, length 600mm large transition cabin, piston door, transition cabin with sliding tray, polishing;

2.3.3. Automatic valve control pumping and replenishing;

2.3.4. Pallet: stainless steel, freely movable extension (with large transition cabin)

2.3.5. Vacuum ≤-0.1mpa(the transition cabin is required to extract vacuum and display the vacuum value)

3. Control system (two sets)

3.1. Mode: Including self-diagnosis, power off self-start features, with pressure control and adaptive functions. Automatic control, cycle control, password protection, vacuum chamber control using LCD display. The unit is controlled by Siemens PLC touch screen.

3.2. Pressure control: Control the pressure of the box and the transition cabin at a certain set value.

a) The user can arbitrarily set the working pressure range between +12.5 and -12.5 mbar, and the PLC will automatically adjust the pressure of the box within the set range. The default value of the operating pressure range is -1 to +3 mbar.

b) When the box pressure is greater than 12 mbar, the PLC automatically opens the safety valve to relieve the pressure and protect the gloves, equipment and materials in the box.

c) Use the foot switch to fine-tune the box pressure.

3.3. Foot pedal: can control the pressure of the glove box, easy operation.

4.Circulation system (including purification and regeneration system) (two sets)

4.1. Germany BASF, United States UOP purification material, Germany Baode valve. The host system is integrated with modular design, automatic electronic control gas solenoid valve group, PLC control, circuit, circulating pump, purification, display integrated with an independent purifier, forming a compact and simple system.

4.2. Control: Water and oxygen are controlled at less than 1PPm

4.3 Adjustment device: The whole process of PLC touch adjustment (heating, evacuation, purification, regeneration) in addition to 2.5 hours of ventilation without human monitoring.

4.4. Working gas: He.N2/ or Ar gas (gas cycle)

4.5. Circulating fan: 0-100m³ high speed variable frequency fan, microprocessor controlled, pressure tested stainless steel device.

4.6. Purification column: single purification column, imported purification material Germany BASF deoxygenation material 5kg, the United States UOP efficient water absorption material 5kg, extremely high life, to ensure that the user in the use of the product purification capacity long-term lasting. Water removal capacity of 2.2㎏, oxygen absorption capacity of 63L.

4.7. Purification valve: automatic electro-pneumatic valve.

4.8. Filter: High efficiency filter with HEPA standard 0.3 micron aperture filter.

4.9, regeneration: used for purification system reuse, so that it is activated; Regeneration requires a mixture of helium /H2, nitrogen /H2, or argon /H2, with H2 accounting for 10%. Regenerated gas advanced flowmeter into purification column.

5. Display system (two sets)

Germany SIEMENS, unit control using Siemens PLC touch screen. Both Chinese and English can be switched.

6.Water analyzer, (imported from abroad) Brand material: UK MICHELL/ ((two sets))

1) Measuring range: 0-1000ppm

2) Accuracy: ±1% ppm

3) Display: The output of the analyzer is connected to the PLC, the detection value is displayed on the touch screen, and the alarm value can be set.

4) Control: The gas circulation system can be controlled according to the user's setting to achieve cycle drop.

5) Environment: -10℃ -50 ℃

7.oxygen analyzer, (imported from abroad) Brand material: AVCRAY ((two sets))

1) Measurement range can be set: 0-1000ppm

2) Environment: -10℃ -50 ℃

3) Accuracy: ±1% ppm

4) Installation position: The oxygen sensor is installed on the box, regardless of gas circulation or not, the oxygen sensor continuously detects the atmosphere in the box and shows the oxygen content in the glove box.

5) Sensor: electrochemical material battery, its advantages are zero accurate, small drift, to avoid other battery materials easy to be corroded; Low replacement cost (only oxygen battery replacement).

6) Display: The output of the analyzer is connected to the PLC, the detection value is displayed on the touch screen, and the alarm value can be set.

7) Control: The user can choose the automatic cycle function to maintain the oxygen content in the glove box within the specified range of the user.

8. Vacuum system (two sets)

Added vacuum pump start-stop time control. Vacuum pump selected British Edwards vacuum pump, model RV12, flow 12m3/h, limit vacuum 2x10-3 mbar. The transition cabin can be vacuumed separately and can be controlled separately at any time. (imported from abroad)

9. Box automatic cleaning (two sets)

Automatic gas control plating plate; The user sets the cleaning time, and then touch the start button on the touch screen, the system will start cleaning the box, and automatically stop at the set time.

10. Organic solvent adsorption system (two sets)

In order to prevent the influence of organic solvents on the purification column, a solvent column is connected in series to the glove box system, and the medium is mainly high-quality and efficient activated carbon and activated alumina to prevent the formation of hydrofluoric acid. The organic solvent adsorption system is filled with 7KG, and there is a KF40 interface on the top and bottom of the column, which is convenient for refueling, and the user can refueling by himself.

11. Equipment working conditions: (provided by the user)

1.Power supply: two-phase three-wire AC220V, power 3Kw;

1.1 The laboratory should have an independent ground wire: < 3Ω, from the equipment to the ground wire connection is recommended to use ≥10mm2 flat copper wire;

1.2. Water supply: None;

1.3. Relative humidity: < 75%;

1.4. No large amount of dust, no corrosive, flammable and explosive gas in the room;

1.5. Equipment floor area:Length × width × height :4500mm ×1200mm × 2000mm

C. Spinning machine EZ4-S

a. Product performance:

1. Small appearance, suitable for glove box operation

2. Corrosion-resistant transparent cover, constant torque positioning hinge

3. Integrated mold cavity, easy to disassemble and clean, easy to replace,

4. LCD text display, color mask button, easy to use,

5. The acceleration and deceleration speed is controllable and adjustable, and multi-step program operation control can be set

6. Dc brushless motor, maximum recommended spin coating size: 4 inches round substrate

7. Aluminum alloy shell (EZ4-S), corrosion resistant PP shell optional (EZ4-S-PP)

b. Product parameters:

1. Speed range: 100-9999rpm

2. Speed resolution: 1rpm

3. Adjustable acceleration range: 100-9999rpm/s

4. Maximum single step length: 3000s

5. Time resolution: 1s

6. Single step or multi-step operation is optional. Up to 5 groups of 5-step programs can be set

7. Wide voltage application: AC100-230V input, English and Chinese optional

8. Standard with 10mm, 25mm, 55mm three specifications vacuum tray

9. Appearance size: 210mm (W) *265mm (D) *213mm (H).

D. Main configuration