Lab 1200C Single Zone Tube Furnace CVD System 

The CVD system consists of gas supply system + tube furnace + vacuum system, and the maximum temperature can reach 1200 degrees, 1400 degrees, 1600 degrees, and 1700 degrees. The heating zone can be single temperature zone, dual temperature zone, three temperature zone, etc. The ultimate vacuum can reach 10-3Pa. The gas supply system can be mass flowmeter or float flowmeter for flow regulation. The number of mixing channels can be 2 channels, 3 channels, 4 channels, and 5 channels.

Detailed technical parameters of tube furnace

Type	1200-I	1200-II	1200-III	1200-V	1200-VI	1200-VII
Power	3.5KW	3.5KW	3.5KW	5KW	6KW	7KW
Tube size（OD(mm)	Dia 60 X1000	Dia80X1000	Dia100X1000	Dia150X1000	Dia200X1000	Dia250X1000
Dimensions	1140X450X690	1140X450X690	1140X450X690	1110X530X755	1120X580X805	1314X680X905
Supply voltage	220V
Phase	Single phase
Heating element	Resistance wire
Temperature control	UAV program temperature control instrument (standard) 1, 30-stage program temperature control intelligent PID adjustment. 2. With over-temperature protection, the electric furnace heating circuit is automatically cut off when the temperature is over-temperature or broken, (when the electric furnace temperature exceeds 1200 degrees or the thermocouple is blown, the AC relay on the main circuit will be automatically disconnected, the main circuit is broken. On, the ON light on the panel is off, the OFF light is on, and the limited protection electric furnace). 3, with 485 communication interface (standard when purchasing software) 4, with power-off protection function, that is, when the power is turned on after the power is turned off, the program does not start from the starting temperature, but the furnace temperature rises from the time of power failure. 5, the meter has the function of temperature self-tuning (you need to pay extra for the replacement of imported instruments, optional)                                                                                               FP93 temperature controller (shimashima, Japan)   EUROPEAN instrument   Touch screen instrument
Chamber material	1. High-quality high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration. 2. Formed by Japanese technology. 3. The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by the thermal software.
Valve and flange
60/80/100top view
Temperature calibration (optional)	Regular temperature calibration of the tube furnace maintains the accuracy and uniformity of the furnace temperature. You can purchase a simple calibration tool from the company to assist you with this work. The complete calibration kit includes a standard thermocouple S-type, temperature calibrator.
Control accuracy	+/- 1℃
Trigger	Phase-shifted trigger
Electric appliance	Zhejiang chint
Silicon controlled	106/16ESEMIKRON
Maximum temperature	1200℃
Rated temperature	1150℃
Heating rate	≤30℃/ Min(it can be modified as required)
Recommended rate of temperature rise	≤15 ℃/ Min
Thermocouple Type	K Type
Heating length	400-440mm
Constant temperature length	150mm
Temperature field curve
Peripheral surface temperature	≤45℃
Open cover protection system	When the furnace cover is opened, the relay will automatically cut off the main power supply, effectively ensuring the safety of the user.

VS-0.1 Vacuum System (VRD16)

 The system (can pump the vacuum in the tube furnace to 0.6Pa) consists of a suction flange (self-made) with KF25 interface, high vacuum baffle method, resistance vacuum gauge, bellows, bracket (homemade), vacuum pump Connect the tee pipe at the flange outlet, connect the resistance silicon to one end of the three-way pipe, connect the high vacuum flapper valve to the other end, connect the flapper valve and the vacuum pump with the corrugation of Dia25, and use the KF25 quick clamp for the connection port. .

1. Pressure detection system

   ZDR-I/ZDR-I-LED type single resistance vacuum gauge

     The resistance vacuum gauge (also known as the Pirani vacuum gauge) uses a specially stabilized ZJ-52T resistance gauge and applies a new constant temperature operation mode to the constant power. At the same time, the microprocessor is used to control the nonlinearity of the regulation. Linear processing. It has the characteristics of stable performance, wide measuring range, fast response and small drift. And powerful and reliable microprocessor-based relay control, serial communication output, vacuum analog output and other functions. Particularly suitable for rough and low vacuum measurement and control of vacuum applications.

2. Technical Parameters:

* Distribution regulation: ZJ-52T resistance gauge

* Measuring range: 10 5～10 -1 Pa

* Number of measurements: 1 way

* Number of control channels: 2 roads can be extended to 4 or 8 roads

* Control range: 5 × 10 3 ~ 5 × 10 -1 Pa

* Control mode: relay contact output, load capacity AC220V/3A (or DC28V/3A) non-inductive load

* Power: 90-260V/50Hz or 220V ± 10% 50Hz

* Power consumption: 25W

* Weight: 4Kg/3Kg/0.5Kg (depending on the chassis)

* Chassis size: 240 × 88 × 280 or 265 × 119 × 280 or 96 × 96 × 120

480 × 88 × 280 or 480 × 119 × 280 (width × height × depth)

3. Performance characteristics:

*LED green screen digital display.

* Wide range of star surveys

* Fast response speed

* Microcomputer correction regulates nonlinearity and reduces measurement errors.

* Optical isolation, digital filtering, enhanced anti-interference ability.

* PVC color panel, beautiful appearance.

* Point control or area relay control output, while the set point has power-down protection memory function.  

4. Adopt VRD16 vacuum pump

2-channel Mass Flow Meter Gas Supply System

1. Overview

1) The gas comes out of the cylinder, depressurizes through the pressure reducing valve, passes through the PTFE tube to the inlet of the gas supply system, and then controls the gas flow through the mass flow meter, then passes through the gas mixing tank and then enters the furnace inlet, and the gas is discharged. The trachea comes out, passes through the three-way valve, one end is connected to the vacuum pump, and one end is connected to the air outlet.

2) A pressure gauge is connected to the gas mixing tank, and the pressure gauge display disk and the mass flowmeter are installed on the same panel.

3) Each gas line has a high pressure shut-off valve for safety.

4) The gas path adopts high-precision gas float flowmeter, and the inner part of the gas path adopts PTFE tube, which has good corrosion resistance.

5) All joints are connected by ferrules, which have good air tightness and high pressure resistance.

2. Technical parameters:

Air channel: 2

Pneumatic flow control: mass flow controller.

Interface: Φ6

Display: LED

Working environment temperature: 5~45°C

Flow controller: Mass flow controller (see below for detailed technical parameters)

PTFE tube: Φ6 outside XΦ4

Pressure vacuum gauge: -0.1～0.15 MPa, 0.01 MPa/division

Globe valve: Φ6

3. The internal pressure of the gas supply system should not be too large, otherwise it will easily cause air leakage, as long as the gas can flow out normally.

4. Configuration of the gas supply system:

1) Mass flowmeter: 2

2) Pressure gauge: 1

3) Cut-off valve: 3

4) Through the board connector: 3

5) Valve connector: 2

6) Cylinder joints: 2

7) Teflon tube: 10M

8) Aeration tank: 1

9) Furnace rack: 1 set

Mass flowmeter technical parameters: Mass flow controller common type, analog circuit, rubber seal, tubular shunt, not easy to block.

main indicators:

Range: 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range arbitrarily)

•      Accuracy: ±1.5% F.S

•      Linear: ±0.5 to 1.5% F.S

•      Repeatability: ±0.2% F.S

•      Response time: 10S

•      Air pressure drop: <0.01MPa

•      Maximum pressure: 3MP

•      Working environment temperature: 5～45°C

•      Input and output signals: 0~+5.00V

•      Power: +15V 50mA -15V 50mA

•      Dimensions: 158*30*110

1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.