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Email: Gia@tmaxlaboratory.com
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Item No.:
TMAX-1600PECVDPayment:
L/C, T/T, Western Union, Credit Cards, PaypalShipping port:
Xiamen PortLead Time:
5 DaysCertificate:
CE, IOS, ROHS, SGS, UL CertificateWarranty:
Two years limited warranty with lifetime technical support1600C PECVD Furnace with Gas Supply System and Vacuum System
The PECVD system consists of a tube furnace, a quartz vacuum chamber, a vacuum system, a gas supply system, and a radio frequency power supply system. Mainly used for: growth of metal thin films, ceramic thin films, composite thin films, graphene, etc. It is easy to add functions, and can expand functions such as plasma cleaning and etching. The PECVD system has the advantages of high film deposition rate, good uniformity, high consistency and stability.
Detailed technical parameters
Model |
TL1600-I |
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Power |
5KW |
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Tube size(OD)(mm) |
High-purity corundum tube:60mm(tube diameter) Two furnace plugs are placed on each side. The furnace plug can block the heat radiation in the center of the furnace tube and must be placed in the correct position in the furnace before heating. |
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Dimension |
1120X490X855 |
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supply voltage |
220V |
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phase |
single phase |
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heating element |
1800 model silicon molybdenum bar |
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Temperature control type |
Use Yudian program temperature control instrument (standard) 1. 30-segment program temperature control intelligent PID adjustment. 2. With over-temperature protection, the electric furnace heating circuit will be automatically cut off when the temperature is over-temperature or when the couple is broken. ON, the ON light on the panel is off, the OFF light is on, and the electric furnace is limitedly protected). 3. With 485 communication interface (standard with optional software) 4. It has a power failure protection function, that is, when the furnace is powered on after the power is turned off, the program does not start from the initial temperature, but starts from the furnace temperature when the power is off. 5.The meter has the function of temperature self-tuning
(you need to pay extra for the replacement of imported instruments, optional)
FP93 instrument EUROTHERM instrument Touch screen instrument (shimaden, Japan) |
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Chamber material |
1. The hearth material is made of high quality alumina polycrystalline fiber. 2. The surface of the inner furnace is coated with imported 1800 degree high temperature alumina coating, which can increase the emissivity and make the temperature field more balanced. |
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Valves and flanges |
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control precision |
+/- 1℃ |
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trigger |
Phase-shifted trigger |
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electric appliance |
Zhejiang chint |
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silicon controlled |
106/16E SEMIKRON |
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Max. temp |
1600℃ |
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Rated temp |
1550℃ |
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heating rate |
≤20℃/ Min(Can be modified as required) |
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Recommended rate of heating |
≤10 ℃/ Min |
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Thermocouple model |
B Type |
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Length of heating section |
300mm |
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Ambient surface temperature |
≤45℃ |
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Vacuum system
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VS-0.1 vacuum system VS-0.1 vacuum system can draw the vacuum degree in the tube furnace tube to0.1Pa(and equipped with resistance vacuum gauge display). With LED green screen digital display. Adopt VRD16 vacuum pump
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Gas supply system |
Gas flow meter gas supply system Technical parameters: l Pneumatic channel: 6 l Pneumatic flow control: use mass flow meter. l Cabinet size: 600X600X600mm l With LED display l Technical parameters of mass flowmeter:
Technical parameters of Mass Flow Controller: Product description: Common type, analog circuit Product detailed description: Ordinary type, analog circuit, rubber seal, tubular shunt, not easy to block. Main indicators:
Configuration of gas supply system:
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Main technical parameters of RF power supply:
Power output range |
0-500W |
Maximum reflected power |
200W |
working frequency |
RF: 13.56MHZ±0.005% |
Power stability |
+/-0.1% |
Harmonic component |
≤-50dbc |
Rf region width |
0-600mm adjustable |
Matching way |
automatic |
Cooling mode |
Points of cold |
Noise |
<50dB |
Radio frequency interface |
50Ω N-type |
Input power |
208-240V 50/60HZ |
Warranty
One year warranty and lifetime technical support
Special Note:
1. Consumable parts such as heating elements, furnace tubes, sample crucibles, etc. are not within the warranty period.
2. Damage caused by the use of corrosive gas and acid gas is not covered by the warranty.
Precautions
1. The air pressure in the furnace tube should not be higher than 0.02MPa
2. Due to the high air pressure inside the gas cylinder, a pressure relief valve must be installed on the gas cylinder when gas is introduced into the furnace tube. To ensure safety, it is recommended to use a pressure below 0.02MPa
3. When the furnace tube used is corundum tube, when the furnace body temperature is higher than 1500 ℃, the furnace tube should not be in a vacuum state, and the air pressure in the furnace tube should be equal to the atmospheric pressure.
4. The gas flow into the furnace tube should be less than 200SCCM to avoid the impact of the cold airflow on the hot furnace tube
5. For the sample heating experiment, it is not recommended to close the exhaust valve and inlet valve of the furnace tube flange end. If you need to close the gas valve to heat the sample, you must always pay attention to the indication of the pressure gauge. If the pressure is greater than 0.02MPa, you must immediately open the exhaust valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.) .
6. Do not use graphite crucibles in alumina tubes.
7. MoSi2 heating element should not be used at low temperature (400℃-700℃) for a long time, otherwise it may damage the heating element.
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
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