High Vacuum Magnetron Dual-head Sputtering Coater with Vacuum Pump

Sales Manager: Gia

Email: Gia@tmaxlaboratory.com

Wechat: Dingqiuna

Product Details

High Vacuum Magnetron Dual-head Sputtering Coater with Vacuum Pump

Technical Specifications

Vacuum Pump Set	(Oil required) Rotary Vacuum Pump + (Oil free) Turbo Molecular Pump set
Rotary Pumping Speed	50 Hz : 16m³/h (4.4 L/s) / 60 Hz : 19.2m /h (5.2 L/s)
Molecular Pumping Speed	300 L/s
Vacuum Limit	5 x10^-5Pa
Working Pressure	0.5-5 Pa
Vacuuming Time	>10 Min(10^-3Pa)
Vacuum Measure	Measuring range from atmosphere to 10^-6Pa
Gas Control	Gas Flow Controller
Chamber Size	φ260*200mm (height) Metal
Magnetron Target Source	Target sizeφ50*3mm (Cu) / Target source: Weak Magnetic Substance / Materials
Operation Method	Instruction Manual
Weight / Size	100kg / 610mm length420mm wide490mm high
Power Supply	AC 110V 60Hz or AC 220V 50Hz
Power Consumption	<3000W
Cooling Method	Air Cooling(Pump) + Water Cooling(Sputtering Target)
Warranty	One year limited warranty with lifetime product support

1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.

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